Interface structure for semiconductor integrated circuit test equipment

Abstract

An interface structure for use in a semiconductor integrated circuit tester for connecting a test head interface to a DUT interface includes a first frame member having first and second opposite main faces, a second frame member having first and second opposite main faces, and a spacer securing the first and second frame members together in spaced relationship. A first cable assembly header is received in an aperture of the first frame member and includes a conductive element and electrically conductive terminal members exposed at a main face of the first frame member and electrically insulated from the conductive element of the first header. A second cable assembly header is received in an aperture of the second frame member and includes a conductive element and electrically conductive terminal members exposed at a main face of the second frame member and electrically insulated from the conductive element of the second header. Coaxial cables connect each terminal member of the first header to a corresponding terminal member of the second header.