The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Feb. 18, 2004
Yuuki Ojima, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kazuhiro Ueda, Hitachinaka, JP;
Tsuyoshi Morimoto, Hitachinaka, JP;
Yuuki Ojima, Hitachinaka, JP;
Katsuhiro Sasada, Hitachinaka, JP;
Kazuhiro Ueda, Hitachinaka, JP;
Tsuyoshi Morimoto, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Hitachi Science Systems, Ltd., Ibaraki, JP;
Abstract
A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile