The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Nov. 15, 2004
Alpay Yilmaz, San Jose, CA (US);
Simon Yavelberg, Cupertino, CA (US);
Toshikazu Tomita, Narita, JP;
Hui Chen, Burlingame, CA (US);
Noel Manto, American Canyon, CA (US);
David J. Lischka, San Jose, CA (US);
Hung Chih Chen, Santa Clara, CA (US);
Alpay Yilmaz, San Jose, CA (US);
Simon Yavelberg, Cupertino, CA (US);
Toshikazu Tomita, Narita, JP;
Hui Chen, Burlingame, CA (US);
Noel Manto, American Canyon, CA (US);
David J. Lischka, San Jose, CA (US);
Hung Chih Chen, Santa Clara, CA (US);
Applied Materials, Santa Clara, CA (US);
Abstract
Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.