The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Apr. 08, 2004
Jeremie James Dalton, San Jose, CA (US);
Sanjay Gopinath, Fremont, CA (US);
Jason M. Blackburn, Santa Clara, CA (US);
John Stephen Drewery, Alameda, CA (US);
Jeremie James Dalton, San Jose, CA (US);
Sanjay Gopinath, Fremont, CA (US);
Jason M. Blackburn, Santa Clara, CA (US);
John Stephen Drewery, Alameda, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
An excited surfactant species is created by generating plasma discharge in a surfactant precursor gas. A surfactant species typically includes at least one of iodine, led, thin, gallium, and indium. A surface of an integrated circuit substrate is exposed to the excited surfactant species to form a plasma-treated surface. A ruthenium thin film is deposited on the plasma-treated surface using a CVD technique.