The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Jul. 15, 2004
Tsung-yen Tseng, Ping-Tung, TW;
Zhi-hao Chen, Taipei, TW;
Chi-long Tsai, Kaohsiung, TW;
Advanced Semiconductor Engineering Inc., Nantze Export Processing Zone Kaohsiung, TW;
Abstract
A method for forming conductive bumps is applied to a wafer. An under-bump-metallurgy structure and a first photo resist layer are subsequently formed on the wafer. The first photo resist layer, such as a dry film, is patterned to have some openings and then a second photo resist layer is filled into the openings, in which the thickness of the second photo resist layer is fewer than or equal to the thickness of the first photo resist layer. The second photo resist layer is then patterned to have some openings. Next, a conductive layer is formed in the openings and then both the first and second photo resist layers are removed. With the conductive layer as a mask, the exposed under-bump-metallurgy structure is removed and then the conductive layer is reflowed to form some conductive bumps. With two kinds of photo resist layers, the conductive bumps can be provided with increased heights and decreased pitches.