The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jul. 19, 2002
Blaine R. Spady, Lincoln, NE (US);
Christopher W. Blaufus, San Jose, CA (US);
Douglas A. Page, San Jose, CA (US);
Dan M. Colban, Tracy, CA (US);
Blaine R. Spady, Lincoln, NE (US);
Christopher W. Blaufus, San Jose, CA (US);
Douglas A. Page, San Jose, CA (US);
Dan M. Colban, Tracy, CA (US);
Nanometrics Incorporated, Milpitas, CA (US);
Abstract
An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piezoelectric actuator or a shape memory alloy. The tab may be biased into the closed position such that when a substrate is held by the edge by the moveable tab and one or more fixed tabs. If desired, more than one moveable tab may be used.