The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Jun. 30, 2001
Gurer Emir, Scotts Valley, CA (US);
Tom Zhong, Santa Clara, CA (US);
John Lewellen, San Jose, CA (US);
Edward C. Lee, Cupertino, CA (US);
Robert P. Mandal, Saratoga, CA (US);
James C. Grambow, San Jose, CA (US);
Ted C. Bettes, Newark, CA (US);
Donald R. Sauer, San Jose, CA (US);
Edmond R. Ward, Monte Sereno, CA (US);
Gurer Emir, Scotts Valley, CA (US);
Tom Zhong, Santa Clara, CA (US);
John Lewellen, San Jose, CA (US);
Edward C. Lee, Cupertino, CA (US);
Robert P. Mandal, Saratoga, CA (US);
James C. Grambow, San Jose, CA (US);
Ted C. Bettes, Newark, CA (US);
Donald R. Sauer, San Jose, CA (US);
Edmond R. Ward, Monte Sereno, CA (US);
ASML Holding N.V., , NL;
Abstract
A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing through an inlet. The polymer solution is deposited onto the surface of the substrate in the housing and the substrate is then spun. The control gas and any solvent vapor and particulate contaminants suspended in the control gas are exhausted from the housing through an outlet and the solvent vapor concentration is controlled by controlling the temperature of the housing and the solvent from which the solvent vapor-bearing gas is produced. Instead the concentration can be controlled by mixing gases having different solvent concentrations. The humidity of the gas may also be controlled.