The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Jun. 25, 2004
Anthony DE LA Llera, Union City, CA (US);
Xuyen Pham, Fremont, CA (US);
Cangshan Xu, Fremont, CA (US);
David Wei, Fremont, CA (US);
Tony Luong, San Jose, CA (US);
Anthony de la Llera, Union City, CA (US);
Xuyen Pham, Fremont, CA (US);
Cangshan Xu, Fremont, CA (US);
David Wei, Fremont, CA (US);
Tony Luong, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An air platen assembly is described and includes a platen that has a plurality of concentric rings. Each of the rings has a plurality of openings in order to provide a cushion of air to a CMP belt. At least one of the rings extends beyond an outer edge of a wafer to be planarized by the CMP belt. A support is attached with the platen and has a plurality of air ports for pressurized air to pass to the rings of the platen. A gasket is positioned between the support and the platen and has a plurality of cutouts that align with the openings and the air ports. A base is also included and supports the support.