The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Jul. 26, 2004
Applicants:
Haowen Bu, Plano, TX (US);
PR Chidambaram, Richardson, TX (US);
Rajesh Khamankar, Coppell, TX (US);
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01I 21/302 (2006.01); H01I 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
Transistor fabrication methods () are presented in which shrinkable sidewall spacers () are formed () along sides of a transistor gate (), and a source/drain implant is performed () after forming the sidewall spacer (). The sidewall spacer width is then reduced by annealing the shrinkable sidewall spacer material () following the source/drain implant ().