The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Jun. 19, 2003
Applicants:
Yo-sep Min, Suwon, KR;
Eun-ju Bae, Seongnam, KR;
Won-bong Choi, Yongin, KR;
Young-jin Cho, Incheon, KR;
Jung-hyun Lee, Suwon, KR;
Inventors:
Yo-sep Min, Suwon, KR;
Eun-ju Bae, Seongnam, KR;
Won-bong Choi, Yongin, KR;
Young-jin Cho, Incheon, KR;
Jung-hyun Lee, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing an inorganic nanotube using a carbon nanotube (CNT) as a template, includes preparing a template on which a CNT or a CNT array is formed, forming an inorganic thin film on the CNT by depositing an inorganic material on the template using atomic layer deposition (ALD), and removing the CNT to obtain an inorganic nanotube or an inorganic nanotube array, respectively.
Published as:
KR20030097125A; EP1375431A2; CN1467311A; JP2004027363A; KR100455297B1; EP1375431A3; US2005202684A1; US7005391B2; EP1375431B1; DE60308596D1; CN1312318C; DE60308596T2;