The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Sep. 03, 2004
Satoru Yamaguchi, Hitachinaka, JP;
Takashi Iizumi, Hitachinaka, JP;
Osamu Komuro, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Tatsuya Maeda, Hitachinaka, JP;
Juntaro Arima, Hitachinaka, JP;
Yasuhiko Ozawa, Abiko, JP;
Satoru Yamaguchi, Hitachinaka, JP;
Takashi Iizumi, Hitachinaka, JP;
Osamu Komuro, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Tatsuya Maeda, Hitachinaka, JP;
Juntaro Arima, Hitachinaka, JP;
Yasuhiko Ozawa, Abiko, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.