The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Jul. 22, 2003
Akira Imai, Hachioji, JP;
Katsuya Hayano, Akishima, JP;
Norio Hasegawa, Nishitama, JP;
Renesas Technology Corp., Tokyp, JP;
Abstract
Densely disposed patterns constituting a semiconductor integrated circuit device are divided into a first mask pattern and a second mask patternB such that a phase shifter S can be disposed, and a predetermined pattern is transferred on a semiconductor substrate by multiple-exposure thereof. The second mask patternB has a main light transferring pattern, a plurality of auxiliary light transferring patternsdisposed thereabout, and a phase shifter S disposed in the main light transferring pattern. The auxiliary light transferring patternsare disposed such that respective distances from a center of each thereof to a center of the main light transferring patternare substantially equal. With this arrangement, a densely disposed pattern is transferred with sufficient process transfer margin.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile