The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Mar. 05, 2004
Toshie Yaguchi, Higashiibaraki, JP;
Takeo Kamino, Hitachinaka, JP;
Yoshifumi Taniguchi, Hitachinaka, JP;
Toshie Yaguchi, Higashiibaraki, JP;
Takeo Kamino, Hitachinaka, JP;
Yoshifumi Taniguchi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Hitachi-Science Systems, Ltd., Ibaraki, JP;
Abstract
An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.