The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Sep. 28, 2001
Hiroshi Kannan, Tokyo, JP;
Noboru Tamura, Nirasaki, JP;
Yasuhiko Kojima, Nirasaki, JP;
Tadahiro Ishizaka, Nirasaki, JP;
Hiroshi Kannan, Tokyo, JP;
Noboru Tamura, Nirasaki, JP;
Yasuhiko Kojima, Nirasaki, JP;
Tadahiro Ishizaka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A heater plate, which has a wafer W mounted thereon and which includes a heater in its interior, is placed on a cooling block including a coolant chamber in its interior. The cooling block includes a gas introduction pipe passing therethrough. The gas introduction pipe is connected to a space between the heater plate and the cooling block to make it possible to supply He gas as thermal conduction gas to the space. A gas suction pipeis connected to the space to make it possible to suck He gas.