The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
Dec. 21, 2001
Yuji Yoshimoto, Kumamoto, JP;
Ryouichi Uemura, Kumamoto, JP;
Kunie Ogata, Kumamoto, JP;
Yoichi Deguchi, Tokyo, JP;
Yuji Yoshimoto, Kumamoto, JP;
Ryouichi Uemura, Kumamoto, JP;
Kunie Ogata, Kumamoto, JP;
Yoichi Deguchi, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An object of the present invention is to grasp easily a process history of a target object such as a semiconductor wafer. The processing apparatus of the present invention includes: a processing apparatus body which includes a plurality of process units for executing a prescribed process to a target object, and transport mechanism for transporting said target object between the process units; a first controller for controlling the processing apparatus as a whole; a second controller for controlling the process units; an information storage section for taking in a signal transmitted and received between the first and second controllers; and a host computer for monitoring operation states of the process units. The present invention is extended to a processing system including a plurality of the processing apparatuses connected with a host computer which is further connected with a monitor computer through a communication network.