The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2006

Filed:

Dec. 02, 2003
Applicants:

David J. Coumou, Webster, NY (US);

Clifford C. Weatherell, Rochester, NY (US);

Michael L. Kirk, Bloomfield, NY (US);

Kevin Nasman, North Chili, NY (US);

Inventors:

David J. Coumou, Webster, NY (US);

Clifford C. Weatherell, Rochester, NY (US);

Michael L. Kirk, Bloomfield, NY (US);

Kevin Nasman, North Chili, NY (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 35/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system for field substitution of components of a RF metrology system. The system includes a sensor/cable combination and an analysis unit. Parameters of the RF metrology system are determined prior to placing the RF metrology system in the field. From these parameters, either component, the cable/sensor combination or the analysis module, may be substituted in the field by recalibrating the system for the substituted unit. Such recalibration is carried out utilizing the parameters determined prior to placing the RF metrology system in the field.


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