The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2005

Filed:

Dec. 11, 2002
Applicants:

Byung J. Choi, Round Rock, TX (US);

Ronald D. Voisin, Austin, TX (US);

Sidlgata V. Sreenivasan, Austin, TX (US);

Michael P. C. Watts, Austin, TX (US);

C. Grant Willson, Austin, TX (US);

Norman E. Schumaker, Austin, TX (US);

Mario J. Meissl, Austin, TX (US);

Inventors:

Byung J. Choi, Round Rock, TX (US);

Ronald D. Voisin, Austin, TX (US);

Sidlgata V. Sreenivasan, Austin, TX (US);

Michael P. C. Watts, Austin, TX (US);

C. Grant Willson, Austin, TX (US);

Norman E. Schumaker, Austin, TX (US);

Mario J. Meissl, Austin, TX (US);

Assignee:

Molecular Imprints, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/58 ; G03B027/60 ; G03B027/62 ; H01L021/302 ;
U.S. Cl.
CPC ...
Abstract

The present invention is directed to a method for modulating shapes of a substrate, having first and second opposed surfaces. This is achieved by creating a pressure differential between differing regions of the first opposed surface to attenuate structural distortions in the second opposed surface that results from external forces bearing on the substrate.


Find Patent Forward Citations

Choi, Byung. (2005). Method for modulating shapes of substrates (U.S. Patent No. 6980282). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6980282

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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