The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Jan. 04, 2002
Applicants:
Masaki Kurihara, Kanagawa, JP;
Takako Suzuki, Kanagawa, JP;
Kenji Maruyama, Kanagawa, JP;
Satoshi Niikura, Kanagawa, JP;
Kousuke Doi, Kanagawa, JP;
Inventors:
Masaki Kurihara, Kanagawa, JP;
Takako Suzuki, Kanagawa, JP;
Kenji Maruyama, Kanagawa, JP;
Satoshi Niikura, Kanagawa, JP;
Kousuke Doi, Kanagawa, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F007/023 ;
U.S. Cl.
CPC ...
Abstract
A composition includes (A) an alkali-soluble resin, (B) a quinonediazide ester of a compound represented by the following formula:and (C) a compound represented by the following formula:This composition is a positive photoresist composition that is excellent in sensitivity and definition and causes less shrink.