The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jul. 22, 2002
Akio Takahashi, Tokyo, JP;
Yuichi Satsu, Hitachi, JP;
Yoshiko Nakai, Kanazawa, JP;
Igor Yefimovich Kardash, Moscow, RU;
Andrei Vladimirovich Pebalk, Moscow, RU;
Sergei Nicolaevich Chvalun, Moscow, RU;
Karen Andranikovich Mailyan, Moscow, RU;
Akio Takahashi, Tokyo, JP;
Yuichi Satsu, Hitachi, JP;
Yoshiko Nakai, Kanazawa, JP;
Igor Yefimovich Kardash, Moscow, RU;
Andrei Vladimirovich Pebalk, Moscow, RU;
Sergei Nicolaevich Chvalun, Moscow, RU;
Karen Andranikovich Mailyan, Moscow, RU;
Hitachi, Ltd., Tokyo, JP;
Abstract
An organic polymer film of low dielectric constant and high heating resistance which is applicable as an insulating layer of a semiconductor devices is provided, as well as a manufacturing method for the film and a semiconductor device incorporating the film.