The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Oct. 11, 2002
David J. Schroeder, Aurora, IL (US);
Kevin J. Moeggenborg, Naperville, IL (US);
Homer Chou, Hoffman Estates, IL (US);
Jeffrey P. Chamberlain, Aurora, IL (US);
Joseph D. Hawkins, Aurora, IL (US);
Phillip Carter, Naperville, IL (US);
David J. Schroeder, Aurora, IL (US);
Kevin J. Moeggenborg, Naperville, IL (US);
Homer Chou, Hoffman Estates, IL (US);
Jeffrey P. Chamberlain, Aurora, IL (US);
Joseph D. Hawkins, Aurora, IL (US);
Phillip Carter, Naperville, IL (US);
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
The invention provides methods of polishing a substrate comprising (i) contacting a substrate comprising at least one metal layer comprising copper with a chemical-mechanical polishing (CMP) system and (ii) abrading at least a portion of the metal layer comprising copper to polish the substrate. The CMP system comprises (a) an abrasive, (b) an amphiphilic nonionic surfactant, (c) a means for oxidizing the metal layer, (d) an organic acid, (e) a corrosion inhibitor, and (f) a liquid carrier. The invention further provides a two-step method of polishing a substrate comprising a first metal layer and a second, different metal layer. The first metal layer is polishing with a first CMP system comprising an abrasive and a liquid carrier, and the second metal layer is polished with a second CMP system comprising (a) an abrasive, (b) an amphiphilic nonionic surfactant, and (c) a liquid carrier.