The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6930363 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 16, 2005

Filed:

Jul. 27, 2004
Applicants:

Nanseng Jeng, Vancouver, WA (US);

Aftab Ahmad, Colorado Springs, CO (US);

Inventors:

Nanseng Jeng, Vancouver, WA (US);

Aftab Ahmad, Colorado Springs, CO (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L029/94 ;
U.S. Cl.
CPC ...
Abstract

A barrier layer comprising silicon mixed with an impurity is disclosed for protection of gate dielectrics in integrated transistors. In particular, the barrier layer comprises silicon incorporating nitrogen. The nitrogen can be incorporated into an upper portion of the gate polysilicon during deposition, or a silicon layer doped with nitrogen after silicon deposition. The layer is of particular utility in conjunction with CVD tungsten silicide straps.


Find Patent Forward Citations

Jeng, Nanseng. (2005). Barrier in gate stack for improved gate dielectric integrity (U.S. Patent No. 6930363). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6930363

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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