The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Sep. 23, 2004
Hiroaki Shishido, Yokohama, JP;
Yasuhiro Yoshitake, Yokosuka, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Hiroaki Shishido, Yokohama, JP;
Yasuhiro Yoshitake, Yokosuka, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Inspection apparatus and method in which laser source emits a laser beam and a coherence of the laser beam emitted from the laser source is reduced by a coherence reducer. A detector detects light from the sample irradiated with the coherence reduced laser beam and a processor processes a signal outputted from the detector and detects a defect on the sample. The coherence reducer has an optical path which includes a plurality of at least one of optical fibers and glass rods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile