The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Jun. 24, 2003
Applicants:
Richard A. Conti, Katonah, NY (US);
Kenneth Davis, Newburgh, NY (US);
John A. Fitzsimmons, Poughkeepsie, NY (US);
David L. Rath, Stormville, NY (US);
Daewon Yang, Fishkill, NY (US);
Inventors:
Richard A. Conti, Katonah, NY (US);
Kenneth Davis, Newburgh, NY (US);
John A. Fitzsimmons, Poughkeepsie, NY (US);
David L. Rath, Stormville, NY (US);
Daewon Yang, Fishkill, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/322 ;
U.S. Cl.
CPC ...
Abstract
A process for providing regions of substantially lower fluorine content in a fluorine-containing dielectric comprises exposing the fluorine-containing dielectric to a reactive species to form volatile byproducts.