The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
May. 10, 2001
Uwe Wielsch, Berlin, DE;
Michael Arena, Berlin, DE;
Uwe Richter, Wernsdorf, DE;
Georg Dittmar, Berlin, DE;
Albrecht Kruger, Berlin, DE;
Helmut Witek, Krailing, DE;
Uwe Wielsch, Berlin, DE;
Michael Arena, Berlin, DE;
Uwe Richter, Wernsdorf, DE;
Georg Dittmar, Berlin, DE;
Albrecht Kruger, Berlin, DE;
Helmut Witek, Krailing, DE;
Sentech Instruments GmbH, Berlin, DE;
Abstract
This invention concerns an ellipsometer for the examination of a sample whereby the ellipsometer has a broadband light source on the emitter side and a detector on the receiver side for a receiver light beam reflected from the sample. A refractive optic for the generation of a measuring spot on the sample and an aperture arranged on the emitter side for the definition of a measuring spot on the sample. The spectroscopic ellipsometer of the present invention makes it possible to easily produce a precisely defined measuring spot on the sample.