The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Mar. 06, 2003
Applicants:
Justin K. Brask, Portland, OR (US);
Mark L. Doczy, Beaverton, OR (US);
Robert B. Turkot, Jr., Hillsboro, OR (US);
Inventors:
Justin K. Brask, Portland, OR (US);
Mark L. Doczy, Beaverton, OR (US);
Robert B. Turkot, Jr., Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/34 ; B06B001/00 ; B05D003/00 ;
U.S. Cl.
CPC ...
Abstract
Metal may be deposited into trenches, vias, or other wafer openings using a physical vapor deposition chamber under vacuum. Sonic energy may be applied directly to the wafer having the openings to be filled. As a result, pinching off of the openings may be reduced or eliminated.
Brask, Justin. (2005). Acoustic streaming of condensate during sputtered metal vapor deposition (U.S. Patent No. 6896774). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6896774
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile