The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Jan. 02, 2003
Thomas J. Grebinski, Alamo, CA (US);
Ulrike A. Dauderstadt, Dresden, DE;
Torbjörn Sandström, Pixbo, SE;
Ulric B. Ljungblad, Molndal, SE;
Christian Kunath, Dresden, DE;
Eberhard Kurth, Boxdorf, DE;
Thomas J. Grebinski, Alamo, CA (US);
Ulrike A. Dauderstadt, Dresden, DE;
Torbjörn Sandström, Pixbo, SE;
Ulric B. Ljungblad, Molndal, SE;
Christian Kunath, Dresden, DE;
Eberhard Kurth, Boxdorf, DE;
Micronic Laser Systems AB, Taby, SE;
Abstract
The present invention includes methods and devices that improve the radiation-resistance of a movable micromechanical optical element. In particular, a radiation-resistant layer is added to a movable micro-mechanical optical element, suitable to reduce the surface and bulk material changes to the element that result from exposure to pulsed laser energy densities less than 100 micro-joules per square centimeter and at wavelengths less than or equal to about 248 nm.