The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Dec. 04, 2002
Vladimir Machavariani, Rishon Lezion, IL;
David Scheiner, Ganei Yehuda, IL;
Amit Weingarten, Ramat Gan, IL;
Avi Ravid, Cupertino, CA (US);
Vladimir Machavariani, Rishon Lezion, IL;
David Scheiner, Ganei Yehuda, IL;
Amit Weingarten, Ramat Gan, IL;
Avi Ravid, Cupertino, CA (US);
Nova Measuring Instruments Ltd., Rehovot, IL;
Abstract
A method and system are presented for use in controlling a process of material removal from the surface of a patterned structure, by measuring at least one of residue, erosion, dishing and corrosion effects in the structure induced by this process. The structure is imaged utilizing phase modulation of light reflected from the structure, and a phase map of the structure is thereby obtained. This phase map is analyzed and data indicative of light reflective properties of layer stacks of the structure is utilized to determine a phase difference between light reflected from a selected measured site and at least one reference site spaced-apart from the selected site. The phase difference is thus indicative of the measured effect.