The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Nov. 27, 2002
Hernes Jacobs, Eindhoven, NL;
Piet Vosters, Bladel, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Robert Johannes Petrus Van Diesen, Oirschot, NL;
David William Callan, Norwalk, US;
Hernes Jacobs, Eindhoven, NL;
Piet Vosters, Bladel, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Robert Johannes Petrus Van Diesen, Oirschot, NL;
David William Callan, Norwalk, US;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.