The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
May. 14, 2004
Thomas J. M. Castenmiller, Eindhoven, NL;
Andreas B. G. Ariens, Utrecht, NL;
Martinus H. H. Hoeks, Breugel, NL;
Patrick D. Vogelsang, Veldhoven, NL;
Erik R. Loopstra, Eindhoven, NL;
Yimbun P. Kwan, Eindhoven, NL;
Thomas J. M. Castenmiller, Eindhoven, NL;
Andreas B. G. Ariens, Utrecht, NL;
Martinus H. H. Hoeks, Breugel, NL;
Patrick D. Vogelsang, Veldhoven, NL;
Erik R. Loopstra, Eindhoven, NL;
YimBun P. Kwan, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A position measuring device includes a radiation source mounted on an isolated reference frame and a two-dimensional radiation detector mounted adjacent the radiation source. The object whose position is to be detected has a mirroring device, e.g. a retro-reflector, mounted on it so as to reflect light emitted from the radiation source along a return path that is parallel to but displaced from the incident light path. The amount of displacement is dependent on the position of the object and is measured by the two-dimensional detector. Three such devices can be combined in a system to measure the position of the object in all six degrees of freedom.