The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2005
Filed:
Nov. 01, 2002
Yuji Kamikawa, Tosu, JP;
Eiichi Mukai, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Eiichi Mukai, Tosu, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
The present invention provides a substrate processing system and method which can prevent the filter from being stuffed with foreign objects and make the filter accordingly more durable. The substrate processing systemcomprising a substrate processing unitfor processing substrates W with a processing liquid, and a processing liquid recovery passagefor passing the processing liquid discharged from the substrate processing unit, in which the processing liquid recovery passageincludes a filterfor removing foreign objects mixed in the processing liquid, a cleaning fluid supply passagefor feeding a cleaning fluid for cleaning the filter, and a discharge passagefor discharging the processing liquid and the cleaning fluid from the filter