The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2005
Filed:
Apr. 25, 2001
Michael L. Nelson, West Redding, CT (US);
Justin L. Kreuzer, Trumbull, CT (US);
Peter L. Filosi, Bethel, CT (US);
Christopher J. Mason, Newtown, CT (US);
Michael L. Nelson, West Redding, CT (US);
Justin L. Kreuzer, Trumbull, CT (US);
Peter L. Filosi, Bethel, CT (US);
Christopher J. Mason, Newtown, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A focus system that includes a calibration subsystem and a control subsystem. The control subsystem, which includes a control sensor, is in close proximity to the exposing of an image. The calibration subsystem, which includes a calibration sensor and a control sensor, is located remotely from, or off-axis with respect to, the exposing of an image. By separating calibration and control functions, the functional requirements can be separated into two (or more) types of sensors.