The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
Jan. 15, 2003
Gert-jan Heerens, Schoonhoven, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Franciscus Andreas Cornelis Johannes Spanjers, Oirschot, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Thomas Josephus Maria Castenmiller, Eindhoven, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Franciscus Andreas Cornelis Johannes Spanjers, Oirschot, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Thomas Josephus Maria Castenmiller, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a low-pressure environment, a voltage is applied between a tool tip in close proximity to a surface and that surface. Contaminants on the surface are attracted and adhere to the tool. A laser may also be used for in situ cleaning of components of a lithographic projection apparatus.