The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
May. 12, 2003
Yoshifumi Taniguchi, Hitachinaka, JP;
Kazutoshi Kaji, Hitachi, JP;
Yasumitsu Ueki, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Yoshifumi Taniguchi, Hitachinaka, JP;
Kazutoshi Kaji, Hitachi, JP;
Yasumitsu Ueki, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.