The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Mar. 26, 2002
Qing MA, San Jose, CA (US);
Valluri Rao, Saratogo, CA (US);
John Heck, Mountainview, CA (US);
Daniel Wong, Fremont, CA (US);
Michele Berry, Chandler, AZ (US);
Qing Ma, San Jose, CA (US);
Valluri Rao, Saratogo, CA (US);
John Heck, Mountainview, CA (US);
Daniel Wong, Fremont, CA (US);
Michele Berry, Chandler, AZ (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A MEMS device may be formed in a hermetic cavity by sealing a pair of semiconductor structures to one another, enclosing the MEMS device. The two structures may be coupled using surface mount techniques as one example, so that the temperatures utilized may be compatible with many MEMS applications. Electrical interconnection layers in one or the other of these structures may be utilized to allow electrical interconnections from the exterior world to the MEMS components within the cavity.