The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Feb. 11, 2004
Tadahiro Ohmi, Aoba-ku, Sendai-shi, Miyagi 980-0813, JP;
Satoshi Kagatsume, Nirasaki, JP;
Kazuhiko Sugiyama, Nirasaki, JP;
Yukio Minami, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Katsunori Yonehana, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Jun Hirose, Nirasaki, JP;
Kazuo Fukazawa, Nirasaki, JP;
Hiroshi Koizumi, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Akihiro Morimoto, Osaka, JP;
Tomio Uno, Osaka, JP;
Eiji Ideta, Osaka, JP;
Atsushi Matsumoto, Osaka, JP;
Toyomi Uenoyama, Osaka, JP;
Takashi Hirose, Osaka, JP;
Tadahiro Ohmi, Aoba-ku, Sendai-shi, Miyagi 980-0813, JP;
Satoshi Kagatsume, Nirasaki, JP;
Kazuhiko Sugiyama, Nirasaki, JP;
Yukio Minami, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Katsunori Yonehana, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Michio Yamaji, Osaka, JP;
Jun Hirose, Nirasaki, JP;
Kazuo Fukazawa, Nirasaki, JP;
Hiroshi Koizumi, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Akihiro Morimoto, Osaka, JP;
Tomio Uno, Osaka, JP;
Eiji Ideta, Osaka, JP;
Atsushi Matsumoto, Osaka, JP;
Toyomi Uenoyama, Osaka, JP;
Takashi Hirose, Osaka, JP;
Abstract
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.