The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Aug. 12, 2003
Junichiro Yoshioka, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Masahiko Sekimoto, Tokyo, JP;
Yasuhiko Endo, Tokyo, JP;
Yugang Guo, Tokyo, JP;
Junichiro Yoshioka, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Masahiko Sekimoto, Tokyo, JP;
Yasuhiko Endo, Tokyo, JP;
Yugang Guo, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate holder holds a substrate while hermetically sealing an outer circumferential edge and a reverse side of the substrate and exposing a surface of the substrate. The substrate holder has a base and a cover having an opening defined therein and positioned to place the substrate between the base and the cover. An attracting mechanism couples the base and the cover to each other to hold the substrate between the base and the cover, with the surface of the substrate being exposed through the opening.