The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Feb. 28, 2000
Donald S. Farquhar, Endicott, NY (US);
Edmond O. Fey, Vestal, NY (US);
Elizabeth Foster, Friendsville, PA (US);
Michael J. Klodowski, Endicott, NY (US);
Paul G. Rickerl, Endicott, NY (US);
Donald S. Farquhar, Endicott, NY (US);
Edmond O. Fey, Vestal, NY (US);
Elizabeth Foster, Friendsville, PA (US);
Michael J. Klodowski, Endicott, NY (US);
Paul G. Rickerl, Endicott, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and associated structure for increasing the rate at which a chromium volume is etched when the chromium body is contacted by an acid solution such as hydrochloric acid. The etch rate is increased by a metallic or steel body in continuous electrical contact with the chromium volume, both of which are in continuous contact with the acid solution. At a temperature between about 21° C. and about 52° C., and a hydrochloric acid concentration (molarity) between about 1.2and about 2.4, the etch rate is at least a factor of about two greater than an etch rate that would occur in an absence of the steel body. In one embodiment, the chromium volume is a chromium layer that rests upon a conductive layer that includes a metal such as copper, wherein the acid solution is not in contact with the conductive layer. In another embodiment, the chromium volume is a chromium layer located under a conductive layer that includes a metal such as copper, wherein the steel body and the acid solution both contact the chromium layer through an opening in the conductive layer such that the opening exposes the chromium layer.