The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Mar. 29, 2002
Applicant:
Inventors:
Michael Laughery, Austin, TX (US);
David Wasinger, Scottsdale, AZ (US);
Nickhil Jakatdar, Los Altos, CA (US);
Assignee:
Timbre Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
A method and system in integrated circuit metrology for adapting a metrology system to work with diverse metrology devices. One embodiment is a method and system for generating signal adjustment data to adapt measured diffraction signals to enable use of a library of diffraction signals and structure profiles created for a different metrology device. Another embodiment is the creation and use of a data store of diffraction adjustment vectors and metrology device specifications relative to a reference device specification.