The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Dec. 19, 2002
Applicant:
Inventors:
Hendrikus Herman Marie Cox, Eindhoven, NL;
Frank Auer, Eindhoven, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Bastiaan Stephanus Hendrikus Jansen, Loo, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/768 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/768 ;
Abstract
A reaction mass and an actuator are used to reduce unwanted vibrations of an optical element in the projection system of a lithographic projection apparatus. The reaction mass may be mechanically connected only to the optical element or may be compliantly mounted to the projection system frame.