The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Aug. 03, 2000
Clyde Maxwell Guest, Plano, TX (US);
Younes Chtioui, Dallas, TX (US);
Rajiv Roy, Plano, TX (US);
Charles K. Harris, Dallas, TX (US);
Weerakiat Wahawisan, Carrollton, TX (US);
Thomas C. Carrington, Plano, TX (US);
Semiconductor Technologies & Instruments, Inc., Plano, TX (US);
Abstract
A system for inspecting a component, such as a die formed on a silicon wafer, is provided. The system includes a two dimensional inspection system that can locate one or more features, such as bump contacts on the die, and which can also generate feature coordinate data. The system also includes a three dimensional inspection system that is connected to the two dimensional inspection system, such as through an operating system of a processor. The three dimensional inspection system receives the feature coordinate data and generates inspection control data.