The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
May. 07, 2002
Applicant:
Inventors:
Ananda H. Kumar, Fremont, CA (US);
Tetsuya Ishikawa, Saratoga, CA (US);
Kwok Manus Wong, San Jose, CA (US);
Farahmand E. Askarinam, Sunnyvale, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 9/00 ;
U.S. Cl.
CPC ...
B23K 9/00 ;
Abstract
A vacuum chamber, such as a semiconductor wafer plasma processing chamber, is heated by use of a ceramic igniter array consisting of a plurality of ceramic igniters positioned in a substrate.