The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2004
Filed:
Jul. 12, 2002
Applicant:
Inventors:
Erik Roelof Loopstra, Heeze, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Josephus Jacobus Smits, Geldrop, NL;
Antonius Johannes Josephus Van Dijsseldonk, Hapert, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Albrecht Hof, Aalen, DE;
Günter Maul, Aalen, DE;
Michael Mühlbeyer, Aalen, DE;
Klaus Mehlkopp, Alsdorf, DE;
Assignee:
AMSL Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/754 ; G03B 7/02 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/754 ; G03B 7/02 ;
Abstract
A lithographic projection apparatus according to one embodiment of the invention includes a projection system having a plurality of optical elements or sensors mounted on a frame. The frame includes support portions made of a material (e.g. a glass ceramic) having a coefficient of thermal expansion of less than or approximately equal to 0.1×10 K .