The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2004
Filed:
Mar. 26, 2002
Chuan-Yi Wang, Hsinchu, TW;
Tsai-Sen Lin, Hsinchu, TW;
Chon-Shin Jou, Hsinchu, TW;
Chi-Ping Chung, Hsinchu, TW;
Mosel Vitelic, Inc., Hsinchu, TW;
Abstract
Embodiments of the present invention relate to implanting arsenic into a wafer to quickly detect if there is metal contamination, such as iron, aluminum, or manganese, on the wafer. In accordance with an aspect of the present invention, a method for detecting metal contamination of a silicon chip comprises implanting arsenic ions into the silicon chip, and etching the silicon chip with a chemical etching solution. The existence of any metal contamination is detected by observing occurrence of silicon pits on the silicon chip caused by reaction between the arsenic ions and the metal contamination and etching with the chemical etching solution.