The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jun. 06, 2002
Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness
Michael A. Marcus, Honeoye Falls, NY (US);
Thomas F. Kaltenbach, Webster, NY (US);
Duane M. Courtney, Webster, NY (US);
Jiann-Rong Lee, Webster, NY (US);
Eastman Kodak Company, Rochester, NY (US);
Abstract
Apparatus for measuring the surface profile of a sample, includes a fixture for locating a surface of a transparent optical flat relative to a surface of a sample; a low-coherence light interferometer having an optical probe coupled to an XY scanning frame for scanning the surface of the sample through the transparent optical flat to produce interferometric data signals representing the distances between the optical flat surface and the surface of the sample; and a computer system responsive to the interferometric data signals for generating a surface profile of the sample using a best fit to a plane.