The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Jun. 30, 2000
Igor V. Fomenkov, San Diego, CA (US);
Armen Kroyan, San Diego, CA (US);
Jesse D. Buck, San Marcos, CA (US);
Palash P. Das, Vista, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Frederick G. Erie, Encinitas, CA (US);
John M. Algots, San Diego, CA (US);
Gamaralalage G. Padmabandu, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.