The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Oct. 15, 2002
Applicant:
Inventors:
Steven T. Mayer, Lake Oswego, OR (US);
John B. Alexy, West Linn, OR (US);
Jingbin Feng, Lake Oswego, OR (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 ; H01L 2/144 ; B05C 9/14 ; B05C 3/02 ; B08B 3/08 ;
U.S. Cl.
CPC ...
B05D 5/12 ; H01L 2/144 ; B05C 9/14 ; B05C 3/02 ; B08B 3/08 ;
Abstract
Methods and apparatus for reducing heat load and air exposure when using an electroless plating fluid during a plating process, are presented. An electroless plating apparatus, including an electroless plating vessel and recirculation systems, is presented. The electroless plating vessel minimizes air exposure (and thus evaporative cooling and degradation) of the electroless plating fluid while the recirculation systems minimize heat load of the electroless plating fluid.