The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Jun. 06, 2001
Wai M. Lee, Fremont, CA (US);
David J. Maloney, Pleasanton, CA (US);
Paul J. Roman, Pleasanton, CA (US);
Michael A. Fury, San Francisco, CA (US);
Ross H. Hill, Coquitlam, CA;
Clifford Henderson, Conyers, GA (US);
Sean Barstow, Atlanta, GA (US);
EKC Technology, Inc., Hayward, CA (US);
Abstract
The present invention relates generally to a method and apparatus for converting a precursor material, preferably organometallic, to a film, preferably metal-containing, that is adherent to at least a portion of a substrate. Both method and apparatus include a pre-conversion step or section, and a step or section for substantial conversion of a portion of material from the pre-conversion step or section into the form of a predetermined pattern, wherein this substantial conversion results in a metal-containing patterned layer on the substrate.