The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Jul. 12, 2000
Applicant:
Inventors:
Marie Angelopoulos, Cortlandt Manor, NY (US);
Edward D. Babich, Chappaqua, NY (US);
Inna V. Babich, Chappaqua, NY (US);
Kuang-Jung Chen, Poughkeepsie, NY (US);
Wayne Martin Moreau, Wappingers Falls, NY (US);
David E. Seeger, Congers, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/12 ;
U.S. Cl.
CPC ...
H01B 1/12 ;
Abstract
The present invention is an admixture of an electrically conductive material and an energy sensitive material resulting in a conductive energy sensitive composition. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resists from electron beams. The compositions are also useful in applications of scanning electron metrology and static dissipation.