The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2003

Filed:

Sep. 06, 2001
Applicant:
Inventors:

Kuo-Chyuan Tzeng, Hsin-Chu, TW;

Chen-Jong Wang, Hsin-Chu, TW;

Chung-Wei Chang, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/9772 ;
U.S. Cl.
CPC ...
H01L 2/9772 ;
Abstract

Within a method for fabricating a capacitor structure, and a capacitor structure fabricated employing the method, there is formed within an isolation region adjoining an active region of a semiconductor substrate a laterally asymmetric trench which leaves exposed an upper sidewall portion of the active region of the semiconductor substrate. There is then formed within the laterally asymmetric trench a capacitor node layer which contacts the exposed upper sidewall portion of the active region of the semiconductor substrate and extends above the active region of the semiconductor substrate. The capacitor may be a storage capacitor with increased capacitance fabricated within a memory cell structure of decreased dimensions.


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