The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
May. 09, 2002
Applicant:
Inventors:
Uwe Schroeder, Dresden, DE;
Helmut Horst Tews, Unterhaching, DE;
Irene McStay, Hopewell Junction, NY (US);
Manfred Hauf, Munich, DE;
Matthias Goldbach, Dresden, DE;
Bernhard Sell, Dresden, DE;
Harald Seidl, Feldkirchen, DE;
Dirk Schumann, Schonfliess, DE;
Rajarao Jammy, Wappingers Falls, NY (US);
Joseph F. Shepard, Jr., Fishkill, NY (US);
Jean-Marc Rousseau, Mennecy, FR;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ; H01L 2/1441 ; H01L 2/348 ;
U.S. Cl.
CPC ...
H01L 2/14763 ; H01L 2/1441 ; H01L 2/348 ;
Abstract
Semiconductor devices having deep trenches with fill material therein having low resistivity are provided along with methods of fabricating such semiconductor devices.